Deep learning-based technique for investigating the behavior of MEMS systems with multiwalled carbon nanotubes and electrically actuated microbeams
This paper proposes a model of a doubly clamped electrically actuated microbeam, a structure frequently utilized in microelectromechanical systems (MEMS). The model investigates the effect of electrostatic forces on the deflection of the beam, based on the Euler-Bernoulli beam theory. The Galerkin t...
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| Main Authors: | , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-06-01
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| Series: | MethodsX |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2215016125001839 |
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