Recent Applications of Focused Ion Beam–Scanning Electron Microscopy in Advanced Packaging

Advanced packaging represents a crucial technological evolution aimed at overcoming limitations posed by Moore’s Law, driving the semiconductor industry from two-dimensional toward three-dimensional integrated structures. The increasing complexity and miniaturization of electronic devices have signi...

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Bibliographic Details
Main Authors: Huan Zhang, Mengmeng Ma, Yuhang Liu, Wenwu Zhang, Chonglei Zhang
Format: Article
Language:English
Published: MDPI AG 2025-05-01
Series:Journal of Manufacturing and Materials Processing
Subjects:
Online Access:https://www.mdpi.com/2504-4494/9/5/158
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