Influence of Averaging of Energy of the Sputtered Atoms on Quasiequilibrium Steady-State Condensation
In this paper it is shown, that result of the quasi-equilibrium condensation in accumulative plasma-condensate system depends on the stability of the technological process, which in the general case is determined by the steadiness of the supersaturation, morphology and crystallographic structure of...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2010-01-01
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| Series: | Журнал нано- та електронної фізики |
| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2010/3/articles/jnep_2010_V2_N3_40-53.pdf |
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