Synthesis of phase-change material Ge2Sb2Te5 nanoparticles by laser-induced forward transfer techniques
Experimental results on the synthesis of nanoparticles of Ge2Sb2Te5 phase-change material by the direct laser-induced transfer method are presented. Thin films obtained by the thermal vacuum deposition were used as a donor material and silicon wafers as an acceptor. The laser-induced forward transfe...
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Main Authors: | A.A. Burtsev, V.A. Mikhalevsky, A.A. Nevzorov, A.V. Kiselev, M.R. Konnikova, V.V. Ionin, N.N. Eliseev, A.A. Lotin |
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Format: | Article |
Language: | Russian |
Published: |
Tver State University
2024-12-01
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Series: | Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов |
Subjects: | |
Online Access: | https://physchemaspects.ru/2024/doi-10-26456-pcascnn-2024-16-612/?lang=en |
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