Synthesis of phase-change material Ge2Sb2Te5 nanoparticles by laser-induced forward transfer techniques

Experimental results on the synthesis of nanoparticles of Ge2Sb2Te5 phase-change material by the direct laser-induced transfer method are presented. Thin films obtained by the thermal vacuum deposition were used as a donor material and silicon wafers as an acceptor. The laser-induced forward transfe...

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Main Authors: A.A. Burtsev, V.A. Mikhalevsky, A.A. Nevzorov, A.V. Kiselev, M.R. Konnikova, V.V. Ionin, N.N. Eliseev, A.A. Lotin
Format: Article
Language:Russian
Published: Tver State University 2024-12-01
Series:Физико-химические аспекты изучения кластеров, наноструктур и наноматериалов
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Online Access:https://physchemaspects.ru/2024/doi-10-26456-pcascnn-2024-16-612/?lang=en
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