Porous silicon nanowire arrays fabrication through one-step metal-assisted chemical etching
One-step metal-assisted chemical etching (MACE) was used to fabricate porous silicon nanowire arrays. Also, the effects of doping level, AgNO3 concentration, and HF concentration on the morphology and structure of porous silicon nanowire were investigated. The results show that the higher doping lev...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Science Press
2019-07-01
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| Series: | 工程科学学报 |
| Subjects: | |
| Online Access: | http://cje.ustb.edu.cn/article/doi/10.13374/j.issn2095-9389.2019.07.011 |
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