Porous silicon nanowire arrays fabrication through one-step metal-assisted chemical etching

One-step metal-assisted chemical etching (MACE) was used to fabricate porous silicon nanowire arrays. Also, the effects of doping level, AgNO3 concentration, and HF concentration on the morphology and structure of porous silicon nanowire were investigated. The results show that the higher doping lev...

Full description

Saved in:
Bibliographic Details
Main Authors: HE Zu-dong, GENG Chao, QIU Jia-jia, YANG Xi, XI Feng-shuo, LI Shao-yuan, MA Wen-hui
Format: Article
Language:zho
Published: Science Press 2019-07-01
Series:工程科学学报
Subjects:
Online Access:http://cje.ustb.edu.cn/article/doi/10.13374/j.issn2095-9389.2019.07.011
Tags: Add Tag
No Tags, Be the first to tag this record!