Simulation Modelling of Diamond-like Carbon Film for Semiconductor Device Passivation
In order to build the simulative model of diamond-like carbon, it used PECVD to deposite diamond-like carbon from quartz and silicon substrate, which was suitable for power semiconductor device as passivation layer. Band gap was measured through the spectrum absorption method. Combining with its ele...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Office of Control and Information Technology
2016-01-01
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| Series: | Kongzhi Yu Xinxi Jishu |
| Subjects: | |
| Online Access: | http://ctet.csrzic.com/thesisDetails#10.13889/j.issn.2095-3631.2016.04.007 |
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