Finite Element Analysis of SAW Sensor with ZnO Substrate for Dichloromethane (DCM) Gas Detection
A SAW gas sensor based on Zinc Oxide (ZnO) piezoelectric substrate is simulated and evaluated for the detection of the dichloromethane (DCM) volatile organic compound (VOC). The study is performed based on the finite element method (FEM) using COMSOL Multiphysics software. The obtained device respon...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Institute of Fundamental Technological Research Polish Academy of Sciences
2021-08-01
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| Series: | Archives of Acoustics |
| Subjects: | |
| Online Access: | https://acoustics.ippt.pan.pl/index.php/aa/article/view/2936 |
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