Laterally Excited Bulk Acoustic Wave Resonators with Rotated Electrodes Using X-Cut LiNbO<sub>3</sub> Thin-Film Substrates

Laterally Excited Bulk Acoustic Wave Resonators with Rotated Electrodes Using X-Cut LiNbO<sub>3</sub> Thin-Film Substrates

With the development of piezoelectric-on-insulator (POI) substrates, X-cut LiNbO<sub>3</sub> thin-film resonators with interdigital transducers are widely investigated due to their adjustable resonant frequency (<i>f<sub>s</sub></i>) and effective electromechanica...

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Bibliographic Details
Main Authors: Jieyu Liu, Wenjuan Liu, Zhiwei Wen, Min Zeng, Yao Cai, Chengliang Sun
Format: Article
Language:English
Published: MDPI AG 2025-03-01
Series:Sensors
Subjects:
X-cut LiNbO<sub>3</sub> thin film
angle rotation
IDT
Online Access:https://www.mdpi.com/1424-8220/25/6/1740
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