Analysis of the Process Influences on the Preparation of SiC Coatings by Chemical Vapor Deposition
Silicon carbide (SiC) coatings prepared by chemical vapor deposition (CVD) are an ideal choice for oxidation-resistant coatings on surface of carbon-based materials，and the processes directly affect the deposition results of the coatings.In order to guide the process control of high-temperature oxid...
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Department of Materials Protection
2024-11-01
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| Series: | Cailiao Baohu |
| Subjects: | |
| Online Access: | http://www.mat-pro.com/fileup/1001-1560/PDF/20241113.pdf |
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