Suspended Slot Membrane Waveguide Based on Germanium-on-Silicon-on-Insulator at λ = 4.23 µm for CO<sub>2</sub> Monitoring
In this work, we propose a novel suspended slot membrane waveguide (SSMW) utilizing a germanium-on-silicon-on-insulator (Ge-on-SOI) platform for carbon dioxide (CO<sub>2</sub>) gas-sensing applications. The design and analysis focus on the absorption line of CO<sub>2</sub> in...
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Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2024-11-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/15/12/1434 |
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