Coherent nanoscale imaging and chemical mapping with compact extreme ultraviolet and soft x-ray sources: Review and perspective

Coherent nanoscale imaging and chemical mapping with compact extreme ultraviolet and soft x-ray sources: Review and perspective

Short-wavelength radiation in the extreme ultraviolet (XUV) and soft x-ray spectral regions offers unique advantages for imaging. With wavelengths ranging from a few nanometers to a few tens of nanometers, these techniques enable spatial resolutions at the nanometer scale. In addition, penetration d...

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Bibliographic Details
Main Authors: W. Eschen, R. Klas, D. S. Penagos Molina, S. Fuchs, G. G. Paulus, J. Limpert, J. Rothhardt
Format: Article
Language:English
Published: AIP Publishing LLC 2025-05-01
Series:APL Photonics
Online Access:http://dx.doi.org/10.1063/5.0254017
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