Coherent nanoscale imaging and chemical mapping with compact extreme ultraviolet and soft x-ray sources: Review and perspective
Short-wavelength radiation in the extreme ultraviolet (XUV) and soft x-ray spectral regions offers unique advantages for imaging. With wavelengths ranging from a few nanometers to a few tens of nanometers, these techniques enable spatial resolutions at the nanometer scale. In addition, penetration d...
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| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-05-01
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| Series: | APL Photonics |
| Online Access: | http://dx.doi.org/10.1063/5.0254017 |
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