Gold- and Silver-Nanoparticle-Assisted Etching of p-Si and n-Si: A Discussion of Etching Behavior Based on Polarization Curves

Metal-assisted etching (metal-assisted chemical etching) is increasingly recognized as a crucial method for fabricating silicon (Si) nanostructures. This process involves the dissolution of Si both directly beneath metal catalysts (local etching) and at locations away from them (remote etching). We...

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Bibliographic Details
Main Authors: Ayumu MATSUMOTO, Tatsuki HASHIGUCHI, Shinji YAE
Format: Article
Language:English
Published: The Electrochemical Society of Japan 2025-02-01
Series:Electrochemistry
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Online Access:https://www.jstage.jst.go.jp/article/electrochemistry/93/2/93_24-00134/_html/-char/en
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