Effect of H2 heat treatment on the switching behavior of ferroelectric AlScN capacitors

Effect of H2 heat treatment on the switching behavior of ferroelectric AlScN capacitors

Impacts of post-heat treatment in a H2-contained (97% Ar and 3% H2) atmosphere on the switching kinetics of (001)-oriented AlScN capacitors are investigated. Fully saturated polarization can be obtained for all capacitors at frequencies of 50 Hz–50 kHz. In contrast to other ferroelectric materials,...

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Main Authors: Nana Sun, Kazuki Okamoto, Shinnosuke Yasuoka, Soshun Doko, Naoko Matsui, Toshikazu Irisawa, Koji Tsunekawa, Haidong Lu, Alexei Gruverman, Hiroshi Funakubo
Format: Article
Language:English
Published: AIP Publishing LLC 2025-05-01
Series:APL Materials
Online Access:http://dx.doi.org/10.1063/5.0268889
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