Effect of H2 heat treatment on the switching behavior of ferroelectric AlScN capacitors
Impacts of post-heat treatment in a H2-contained (97% Ar and 3% H2) atmosphere on the switching kinetics of (001)-oriented AlScN capacitors are investigated. Fully saturated polarization can be obtained for all capacitors at frequencies of 50 Hz–50 kHz. In contrast to other ferroelectric materials,...
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| Main Authors: | , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-05-01
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| Series: | APL Materials |
| Online Access: | http://dx.doi.org/10.1063/5.0268889 |
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