Enhancement of Quality Factors in a 6.5 GHz Resonator Using Mo/SiC Composite Microstructures

Enhancement of Quality Factors in a 6.5 GHz Resonator Using Mo/SiC Composite Microstructures

This study addresses the critical challenge of lateral acoustic wave energy leakage in high-frequency film bulk acoustic resonators (FBARs) and elucidates the reflection mechanism of acoustic waves at acoustic reflection boundaries. Based on the theory of acoustic impedance mismatch, a novel Mo/SiC...

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Bibliographic Details
Main Authors: Binghui Lin, Yupeng Zheng, Haiyang Li, Yuqi Ren, Tingting Yang, Zekai Wang, Yao Cai, Qinwen Xu, Chengliang Sun
Format: Article
Language:English
Published: MDPI AG 2025-04-01
Series:Micromachines
Subjects:
FBAR
SiCOI substrate
microstructure
quality factor
Online Access:https://www.mdpi.com/2072-666X/16/5/529
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