DESIGN PRINCIPLES AND BLOCK SCHEMES OF THE PROBE AUTOMATIC INSPECTION SYSTEMS FOR MICROAND NANOELECTRONICS ON A WAFER
In this work we suggested the principles of design and block schemes of probe systems for analytical and interoperation measurement and inspection of high-speed microand nano on a chip systems in the nanosecond range. The sources of wideband signals distortion and errors of probe inspection systems...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Belarusian National Technical University
2015-04-01
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| Series: | Приборы и методы измерений |
| Subjects: | |
| Online Access: | https://pimi.bntu.by/jour/article/view/100 |
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