High-Frequency Grating-Based Microelectromechanical Systems Actuator

A silicon mechanical-photonic wavelength converter, not based on absorption, has been recently proposed to address the need for all-silicon photodetectors in the infrared spectrum. Its implementation requires high-frequency modulation, from hundreds of kHz to 1 MHz, of a light beam over an area of a...

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Bibliographic Details
Main Authors: Inês Pires, Inês S. Garcia, João Vieira, Zeev Zalevsky, Carlos Calaza, Filipe S. Alves, Rosana A. Dias
Format: Article
Language:English
Published: MDPI AG 2024-04-01
Series:Proceedings
Subjects:
Online Access:https://www.mdpi.com/2504-3900/97/1/155
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