Near-zero nonlinear error pressure sensor based on piezoresistor sensitivity matching for wind tunnel pressure test
Abstract High-precision piezoresistive pressure sensors play a significant role in aerospace, automotive, and other fields. Nonlinear error is the key factor that restricts the improvement of the sensor precision. A mathematical model for evaluating the sensor’s nonlinear error is established, based...
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| Main Authors: | , , , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2025-06-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-025-00959-7 |
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