Development of a Chemical Sensor Device for Monitoring Hazardous Gases Generated in the Semiconductor Manufacturing Process
The semiconductor industry plays a crucial role in various fields but also contributes to environmental degradation. Throughout the semiconductor chip manufacturing process, hazardous gases are released at each stage, despite stringent treatment procedures. These gases can be categorized into four g...
Saved in:
| Main Authors: | , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-11-01
|
| Series: | Chemosensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2227-9040/12/11/233 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|