Machine learning-driven discovery of high-performance MEMS disk resonator gyroscope structural topologies

Abstract The design of the microelectromechanical system (MEMS) disc resonator gyroscope (DRG) structural topology is crucial for its physical properties and performance. However, creating novel high-performance MEMS DRGs has long been viewed as a formidable challenge owing to their enormous design...

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Bibliographic Details
Main Authors: Chen Chen, Jinqiu Zhou, Hongyi Wang, Youyou Fan, Xinyue Song, Jianbing Xie, Thomas Bäck, Hao Wang
Format: Article
Language:English
Published: Nature Publishing Group 2024-10-01
Series:Microsystems & Nanoengineering
Online Access:https://doi.org/10.1038/s41378-024-00792-4
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