Machine learning-driven discovery of high-performance MEMS disk resonator gyroscope structural topologies
Abstract The design of the microelectromechanical system (MEMS) disc resonator gyroscope (DRG) structural topology is crucial for its physical properties and performance. However, creating novel high-performance MEMS DRGs has long been viewed as a formidable challenge owing to their enormous design...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Nature Publishing Group
2024-10-01
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| Series: | Microsystems & Nanoengineering |
| Online Access: | https://doi.org/10.1038/s41378-024-00792-4 |
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