Experimental study on discharge of large cavity inductively coupled plasma
Plasma stealth technology has the advantages of a large absorption bandwidth, easy control, and long-term operation. A large-scale plasma discharge experimental device was designed, and the multi physics simulation platform COMSOL was used to simulate the plasma. Typical parameters such as electron...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2025-06-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/5.0271973 |
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