LSTM-Inversion-Based Feedforward–Feedback Nanopositioning Control
This work proposes a two-degree of freedom (2DOF) controller for motion tracking of nanopositioning devices, such as piezoelectric actuators (PEAs), with a broad bandwidth and high precision. The proposed 2DOF controller consists of an inversion feedforward controller and a real-time feedback contro...
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| Main Authors: | Ruocheng Yin, Juan Ren |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-10-01
|
| Series: | Machines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2075-1702/12/11/747 |
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