LSTM-Inversion-Based Feedforward–Feedback Nanopositioning Control

This work proposes a two-degree of freedom (2DOF) controller for motion tracking of nanopositioning devices, such as piezoelectric actuators (PEAs), with a broad bandwidth and high precision. The proposed 2DOF controller consists of an inversion feedforward controller and a real-time feedback contro...

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Bibliographic Details
Main Authors: Ruocheng Yin, Juan Ren
Format: Article
Language:English
Published: MDPI AG 2024-10-01
Series:Machines
Subjects:
Online Access:https://www.mdpi.com/2075-1702/12/11/747
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