APA (7th ed.) Citation

Xu, J., Ren, Z., Qian, F., Zheng, J., & Yang, Y. A wafer-level sealed silicon cavity microacoustic platform for radio frequency integration. Nature Publishing Group.

Chicago Style (17th ed.) Citation

Xu, Jiashuai, Zijun Ren, Fangsheng Qian, Junyan Zheng, and Yansong Yang. A Wafer-level Sealed Silicon Cavity Microacoustic Platform for Radio Frequency Integration. Nature Publishing Group.

MLA (9th ed.) Citation

Xu, Jiashuai, et al. A Wafer-level Sealed Silicon Cavity Microacoustic Platform for Radio Frequency Integration. Nature Publishing Group.