Temperature-modulated crystallographic orientation and electrical properties of BiFeO3 thick films sputtered on LaNiO3/Pt/Ti/SiO2/Si for piezo-MEMS applications

Temperature-modulated crystallographic orientation and electrical properties of BiFeO3 thick films sputtered on LaNiO3/Pt/Ti/SiO2/Si for piezo-MEMS applications

In this work, thick BiFeO3 films (~1 μm) were prepared on LaNiO3-buffered (111)Pt/Ti/SiO2/(100)Si substrates via radio-frequency magnetron sputtering without post-growth annealing. The effects of the substrate temperature on the film’s crystallinity, defect chemistry, and associated electrical prope...

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Bibliographic Details
Main Authors: Hongyu Luo, Miaomiao Niu, Hanfei Zhu, Li Li, Hongbo Cheng, Chao Liu, Jianting Li, Yuyao Zhao, Chenxi Zhang, Xiaojie Cao, Isaku Kanno, Qingguo Chi, Jun Ouyang
Format: Article
Language:English
Published: Tsinghua University Press 2024-12-01
Series:Journal of Advanced Ceramics
Subjects:
bifeo3 film
ferroelectric
piezoelectric micro-electro–mechanical system (piezo-mems)
low thermal budget
crystallographic orientation
magnetron sputtering
Online Access:https://www.sciopen.com/article/10.26599/JAC.2024.9220985
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https://www.sciopen.com/article/10.26599/JAC.2024.9220985

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