A New Linear Motor Force Ripple Compensation Method Based on Inverse Model Iterative Learning and Robust Disturbance Observer
Permanent magnet linear motors (PMLMs) are gaining increasing interest in ultra-precision and long stroke motion stage, such as reticle and wafer stage of scanner for semiconductor lithography. However, the performances of PMLM are greatly affected by inherent force ripple. A number of compensation...
Saved in:
| Main Authors: | , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Wiley
2018-01-01
|
| Series: | Complexity |
| Online Access: | http://dx.doi.org/10.1155/2018/9647257 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|