A New Linear Motor Force Ripple Compensation Method Based on Inverse Model Iterative Learning and Robust Disturbance Observer

Permanent magnet linear motors (PMLMs) are gaining increasing interest in ultra-precision and long stroke motion stage, such as reticle and wafer stage of scanner for semiconductor lithography. However, the performances of PMLM are greatly affected by inherent force ripple. A number of compensation...

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Bibliographic Details
Main Authors: Xuewei Fu, Xiaofeng Yang, Zhenyu Chen
Format: Article
Language:English
Published: Wiley 2018-01-01
Series:Complexity
Online Access:http://dx.doi.org/10.1155/2018/9647257
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