A Gas Sensor Design and Heat Transfer Simulation with ZnO and TiO2 Sensing Layers
Micro Electro-Mechanical System (MEMS) based devices offer innovative approaches in sensor technologies with the advantages of high efficiency and miniaturization. The most important stage in the development of new generation MEMS-based devices is the design and optimization stage. However, device d...
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| Format: | Article |
| Language: | English |
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Kyrgyz Turkish Manas University
2021-06-01
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| Series: | MANAS: Journal of Engineering |
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| Online Access: | https://dergipark.org.tr/en/download/article-file/1489727 |
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| author | Gözde Konuk Ege Hüseyin Yüce Garip Genç |
| author_facet | Gözde Konuk Ege Hüseyin Yüce Garip Genç |
| author_sort | Gözde Konuk Ege |
| collection | DOAJ |
| description | Micro Electro-Mechanical System (MEMS) based devices offer innovative approaches in sensor technologies with the advantages of high efficiency and miniaturization. The most important stage in the development of new generation MEMS-based devices is the design and optimization stage. However, device design and optimization processes are developed in a laboratory by empirical approaches. This causes time loss and creates an unnecessary waste of resources. In this study, it is aimed to design and analyze two gas sensors based on ZnO and TiO2 sensing layers. Electro-thermal analysis of the sensor structure was carried out at room temperature and high temperature (294,15K-573,15K) and heat transfer parameters were compared. According to the simulation results, it is obtained that, as the applied temperature increases to the sensor, the temperature over the sensing layer increases linearly. It is compatible with the literature. The temperature on the ZnO surface increases to three times the TiO2 surface temperature. The heat transfer results obtained will be used as a guide for device design and optimization in future works. In this way, as a result of numerical analysis, a MEMS-based device will be produced with high accuracy. Thus, time and resources will be saved. |
| format | Article |
| id | doaj-art-4c675ee05769489a8f6463423af941ae |
| institution | Kabale University |
| issn | 1694-7398 |
| language | English |
| publishDate | 2021-06-01 |
| publisher | Kyrgyz Turkish Manas University |
| record_format | Article |
| series | MANAS: Journal of Engineering |
| spelling | doaj-art-4c675ee05769489a8f6463423af941ae2025-02-03T12:07:27ZengKyrgyz Turkish Manas UniversityMANAS: Journal of Engineering1694-73982021-06-0191374410.51354/mjen.8542651437A Gas Sensor Design and Heat Transfer Simulation with ZnO and TiO2 Sensing LayersGözde Konuk Ege0https://orcid.org/0000-0001-7349-0416Hüseyin Yüce1https://orcid.org/0000-0001-5525-7733Garip Genç2https://orcid.org/0000-0001-7711-3845İSTANBUL GEDİK ÜNİVERSİTESİMARMARA ÜNİVERSİTESİMARMARA ÜNİVERSİTESİMicro Electro-Mechanical System (MEMS) based devices offer innovative approaches in sensor technologies with the advantages of high efficiency and miniaturization. The most important stage in the development of new generation MEMS-based devices is the design and optimization stage. However, device design and optimization processes are developed in a laboratory by empirical approaches. This causes time loss and creates an unnecessary waste of resources. In this study, it is aimed to design and analyze two gas sensors based on ZnO and TiO2 sensing layers. Electro-thermal analysis of the sensor structure was carried out at room temperature and high temperature (294,15K-573,15K) and heat transfer parameters were compared. According to the simulation results, it is obtained that, as the applied temperature increases to the sensor, the temperature over the sensing layer increases linearly. It is compatible with the literature. The temperature on the ZnO surface increases to three times the TiO2 surface temperature. The heat transfer results obtained will be used as a guide for device design and optimization in future works. In this way, as a result of numerical analysis, a MEMS-based device will be produced with high accuracy. Thus, time and resources will be saved.https://dergipark.org.tr/en/download/article-file/1489727gas sensorsensing layerfinite element method (femheat transfer) |
| spellingShingle | Gözde Konuk Ege Hüseyin Yüce Garip Genç A Gas Sensor Design and Heat Transfer Simulation with ZnO and TiO2 Sensing Layers MANAS: Journal of Engineering gas sensor sensing layer finite element method (fem heat transfer) |
| title | A Gas Sensor Design and Heat Transfer Simulation with ZnO and TiO2 Sensing Layers |
| title_full | A Gas Sensor Design and Heat Transfer Simulation with ZnO and TiO2 Sensing Layers |
| title_fullStr | A Gas Sensor Design and Heat Transfer Simulation with ZnO and TiO2 Sensing Layers |
| title_full_unstemmed | A Gas Sensor Design and Heat Transfer Simulation with ZnO and TiO2 Sensing Layers |
| title_short | A Gas Sensor Design and Heat Transfer Simulation with ZnO and TiO2 Sensing Layers |
| title_sort | gas sensor design and heat transfer simulation with zno and tio2 sensing layers |
| topic | gas sensor sensing layer finite element method (fem heat transfer) |
| url | https://dergipark.org.tr/en/download/article-file/1489727 |
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