A Gas Sensor Design and Heat Transfer Simulation with ZnO and TiO2 Sensing Layers
Micro Electro-Mechanical System (MEMS) based devices offer innovative approaches in sensor technologies with the advantages of high efficiency and miniaturization. The most important stage in the development of new generation MEMS-based devices is the design and optimization stage. However, device d...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Kyrgyz Turkish Manas University
2021-06-01
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| Series: | MANAS: Journal of Engineering |
| Subjects: | |
| Online Access: | https://dergipark.org.tr/en/download/article-file/1489727 |
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