The Influence of the Ion Implantation of Au– to the Microstructure of the Amorphous-nanocrystaline AlN-TiB2-TiSi2

The Influence of the Ion Implantation of Au– to the Microstructure of the Amorphous-nanocrystaline AlN-TiB2-TiSi2

Direct measurements were performed using TEM, HRTEM, XRD and SEM with microanalysis. The results showed that the thermal annealing at 1300 С in air leads to the formation of nanoscale phases 1015 nm from AlN, AlB2, Al2O3 and TiO2. Moreover, the ion implantation of the negative ions Au– causes frag...

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Bibliographic Details
Main Authors: K.V. Smyrnova, А.A. Demianenko, A.S. Radko, A.V. Pshyk, O.V. Kuzovlev, H. Amekura, K. Oyoshi, Y. Takeda
Format: Article
Language:English
Published: Sumy State University 2015-03-01
Series:Журнал нано- та електронної фізики
Subjects:
Ion implantation
Nanocrystallites
Amorphous structures
Vacancy Loops
Interstitial type
Online Access:http://jnep.sumdu.edu.ua/download/numbers/2015/1/articles/jnep_2015_V7_01040.pdf
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http://jnep.sumdu.edu.ua/download/numbers/2015/1/articles/jnep_2015_V7_01040.pdf

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