Berg, T. v. d., Bosseboeuf, A., Coste, P., & Vincent, L. In situ measurements of thermal and pressure dependent stress in SOG films by phase shifting interferometry. Elsevier.
Chicago Style (17th ed.) CitationBerg, T.M. van den, A. Bosseboeuf, P. Coste, and L. Vincent. In Situ Measurements of Thermal and Pressure Dependent Stress in SOG Films by Phase Shifting Interferometry. Elsevier.
MLA (9th ed.) CitationBerg, T.M. van den, et al. In Situ Measurements of Thermal and Pressure Dependent Stress in SOG Films by Phase Shifting Interferometry. Elsevier.
Warning: These citations may not always be 100% accurate.