An integrated exposure and measurement tool for 5-DOF direct laser writing based on chromatic differential confocal sensing
Accurate and uniform fabrication of microstructures on highly curved substrates requires exposure with the waist of a focused laser beam at every point. In order to realize this, the exposure beam must be held perpendicular and focused onto the local substrate. Here we present an optical tool for ou...
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| Main Authors: | , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2025-01-01
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| Series: | Journal of the European Optical Society-Rapid Publications |
| Subjects: | |
| Online Access: | https://jeos.edpsciences.org/articles/jeos/full_html/2025/01/jeos20250010/jeos20250010.html |
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