Low-loss superconducting resonators fabricated from tantalum films grown at room temperature

Low-loss superconducting resonators fabricated from tantalum films grown at room temperature

Abstract The use of α-tantalum in superconducting circuits has enabled a considerable improvement in the coherence time of transmon qubits. The standard approach to grow α-tantalum thin films on silicon involves heating the substrate, which takes several hours per deposition and prevents the integra...

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Main Authors: Guillaume Marcaud, David Perello, Cliff Chen, Esha Umbarkar, Conan Weiland, Jiansong Gao, Sandra Diez, Victor Ly, Neha Mahuli, Nathan D’Souza, Yuan He, Shahriar Aghaeimeibodi, Rachel Resnick, Cherno Jaye, Abdul K. Rumaiz, Daniel A. Fischer, Matthew Hunt, Oskar Painter, Ignace Jarrige
Format: Article
Language:English
Published: Nature Portfolio 2025-08-01
Series:Communications Materials
Online Access:https://doi.org/10.1038/s43246-025-00897-x
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https://doi.org/10.1038/s43246-025-00897-x

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