Silicon Microthermocycler for Point-of-Care Analytical Systems: Modeling, Design, and Fabrication
A four-tether silicon microthermocycler for point-of-care PCR analytical systems is proposed. Substituting the commonly employed platinum with titanium in the fabrication of thin film resistance temperature detectors and heaters enabled the realization of a smaller device without compromising temper...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2024-10-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/15/11/1325 |
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