Dynamic photomask directed lithography based on electrically stimulated nematic liquid crystal architectures

Abstract Lithography technology is a powerful tool for preparing complex microstructures through projecting patterns from static templates with permanent features onto samples. To simplify fabrication and alignment processes, dynamic photomask for multiple configurations preparation becomes increasi...

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Bibliographic Details
Main Authors: Mengjun Liu, Ruizhi Yang, Zhenghao Guo, Kexu Chen, Haoqiang Feng, Han Lu, Shijian Huang, Minmin Zhang, Huapeng Ye, Lingling Shui
Format: Article
Language:English
Published: Nature Portfolio 2024-10-01
Series:Nature Communications
Online Access:https://doi.org/10.1038/s41467-024-53530-9
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