Load Observing System Based on Wave Reflection for Soft-Switching Control of MHz-Frequency Resonant Inverter Against Load Fluctuations
Applying MHz-frequency inverters to radio frequency (RF) power sources for plasma applications has been challenging because capacitive loads caused by load fluctuations cause destructive hard-switching. This paper proposes a MHz-frequency load impedance estimation method for soft-switching control....
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
IEEE
2025-01-01
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| Series: | IEEE Access |
| Subjects: | |
| Online Access: | https://ieeexplore.ieee.org/document/11075665/ |
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