Change of Optical Properties of Carbon-Doped Silicon Nanostructures under the Influence of a Pulsed Electron Beam
In the work, porous silicon with observed photoluminescence was made from a p-type silicon substrate doped with boron and crystallographic orientation (100) using the method of electrochemical etching in a solution containing H2(SiF6) (silicon hydrofluoric acid) and ethyl alcohol. Thin carbon films...
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| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Wiley
2022-01-01
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| Series: | Journal of Nanotechnology |
| Online Access: | http://dx.doi.org/10.1155/2022/1320164 |
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