Analysis of Metallic-to-Oxide Sputtering Mode Transition During Reactive Magnetron Deposition of Aluminum Oxide Coatings

Analysis of Metallic-to-Oxide Sputtering Mode Transition During Reactive Magnetron Deposition of Aluminum Oxide Coatings

Direct current (DC) reactive magnetron discharge in Ar + O<sub>2</sub> mixtures with an aluminum (Al) target was investigated. Electrical measurements of the discharge voltage and current along with the deposition rate trends observed with varying the oxygen flow rate indicated the prese...

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Main Authors: Andrey V. Kaziev, Alexander V. Tumarkin, Dobrynya V. Kolodko, Maksim M. Kharkov, Raghavendra Konaguru, Dmitry G. Ageychenkov, Nikolay N. Samotaev, Konstantin Yu. Oblov
Format: Article
Language:English
Published: MDPI AG 2025-04-01
Series:Applied Sciences
Subjects:
reactive magnetron sputtering
aluminum oxide
hysteresis
ion mass spectrometry
ion fluxes
optical emission spectroscopy (OES)
Online Access:https://www.mdpi.com/2076-3417/15/8/4305
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