Lift-off free catalyst for metal assisted chemical etching of nanostructured silicon zone plates in vapour phase
Metal-assisted chemical etching of silicon, especially in the vapour phase, is a highly promising technique for fabricating nanostructures with high aspect ratios. Here, a nanoscale pattern of x-ray zone plates written by electron beam lithography works as a mould for Pt electroplating on a Au seed...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
IOP Publishing
2025-01-01
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| Series: | Nano Express |
| Subjects: | |
| Online Access: | https://doi.org/10.1088/2632-959X/adbd5b |
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