D.C. Sputtering Process: Its Characterization and its Problems When Applied to Tin-Dioxide Thin-Films
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Main Author: | Anant G. Sabnis |
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Format: | Article |
Language: | English |
Published: |
Wiley
1980-01-01
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Series: | Active and Passive Electronic Components |
Online Access: | http://dx.doi.org/10.1155/APEC.7.19 |
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