D.C. Sputtering Process: Its Characterization and its Problems When Applied to Tin-Dioxide Thin-Films

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Bibliographic Details
Main Author: Anant G. Sabnis
Format: Article
Language:English
Published: Wiley 1980-01-01
Series:Active and Passive Electronic Components
Online Access:http://dx.doi.org/10.1155/APEC.7.19
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