D.C. Sputtering Process: Its Characterization and its Problems When Applied to Tin-Dioxide Thin-Films
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Format: | Article |
Language: | English |
Published: |
Wiley
1980-01-01
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Series: | Active and Passive Electronic Components |
Online Access: | http://dx.doi.org/10.1155/APEC.7.19 |
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_version_ | 1832550269166026752 |
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author | Anant G. Sabnis |
author_facet | Anant G. Sabnis |
author_sort | Anant G. Sabnis |
collection | DOAJ |
format | Article |
id | doaj-art-4118a51701bb406f90d494352e701fe5 |
institution | Kabale University |
issn | 0882-7516 1563-5031 |
language | English |
publishDate | 1980-01-01 |
publisher | Wiley |
record_format | Article |
series | Active and Passive Electronic Components |
spelling | doaj-art-4118a51701bb406f90d494352e701fe52025-02-03T06:07:15ZengWileyActive and Passive Electronic Components0882-75161563-50311980-01-0171-3192210.1155/APEC.7.19D.C. Sputtering Process: Its Characterization and its Problems When Applied to Tin-Dioxide Thin-FilmsAnant G. Sabnishttp://dx.doi.org/10.1155/APEC.7.19 |
spellingShingle | Anant G. Sabnis D.C. Sputtering Process: Its Characterization and its Problems When Applied to Tin-Dioxide Thin-Films Active and Passive Electronic Components |
title | D.C. Sputtering Process: Its Characterization and its Problems When Applied to Tin-Dioxide Thin-Films |
title_full | D.C. Sputtering Process: Its Characterization and its Problems When Applied to Tin-Dioxide Thin-Films |
title_fullStr | D.C. Sputtering Process: Its Characterization and its Problems When Applied to Tin-Dioxide Thin-Films |
title_full_unstemmed | D.C. Sputtering Process: Its Characterization and its Problems When Applied to Tin-Dioxide Thin-Films |
title_short | D.C. Sputtering Process: Its Characterization and its Problems When Applied to Tin-Dioxide Thin-Films |
title_sort | d c sputtering process its characterization and its problems when applied to tin dioxide thin films |
url | http://dx.doi.org/10.1155/APEC.7.19 |
work_keys_str_mv | AT anantgsabnis dcsputteringprocessitscharacterizationanditsproblemswhenappliedtotindioxidethinfilms |