Self-Heating Effect Coupled Compact Model to Predict Hot Carrier Injection Degradation in Nanoscale Bulk FinFETs Under Different Conditions

The HCI effect has been the focus of research as a common reliability consideration under advanced nodes in semiconductors. In this paper, a new compact model that takes into account the self-heating effect, width dependence, and substrate voltage dependence is proposed in the framework of a self-sa...

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Main Authors: Bingrui Liu, Lan Chen
Format: Article
Language:English
Published: MDPI AG 2025-02-01
Series:Applied Sciences
Subjects:
Online Access:https://www.mdpi.com/2076-3417/15/5/2351
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author Bingrui Liu
Lan Chen
author_facet Bingrui Liu
Lan Chen
author_sort Bingrui Liu
collection DOAJ
description The HCI effect has been the focus of research as a common reliability consideration under advanced nodes in semiconductors. In this paper, a new compact model that takes into account the self-heating effect, width dependence, and substrate voltage dependence is proposed in the framework of a self-saturated power–law model containing oxide defects. The compact model employs different parameters in different carrier energy regions to improve the accuracy of the model. The predictions of the model fit well with experimental data extracted from the literature and the TCAD data, proving the validity of the model. Meanwhile, the model is used in this paper to predict and analyze the HCI’s degradation as well as lifetime under different conditions.
format Article
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institution DOAJ
issn 2076-3417
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spelling doaj-art-402d2316348741508f3bd9cb0cbfa01f2025-08-20T02:52:41ZengMDPI AGApplied Sciences2076-34172025-02-01155235110.3390/app15052351Self-Heating Effect Coupled Compact Model to Predict Hot Carrier Injection Degradation in Nanoscale Bulk FinFETs Under Different ConditionsBingrui Liu0Lan Chen1Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, ChinaUniversity of Chinese Academy of Sciences, Beijing 101408, ChinaThe HCI effect has been the focus of research as a common reliability consideration under advanced nodes in semiconductors. In this paper, a new compact model that takes into account the self-heating effect, width dependence, and substrate voltage dependence is proposed in the framework of a self-saturated power–law model containing oxide defects. The compact model employs different parameters in different carrier energy regions to improve the accuracy of the model. The predictions of the model fit well with experimental data extracted from the literature and the TCAD data, proving the validity of the model. Meanwhile, the model is used in this paper to predict and analyze the HCI’s degradation as well as lifetime under different conditions.https://www.mdpi.com/2076-3417/15/5/2351hot carrier injectionbulk FinFETself-heating effectself-saturation modelreaction–diffusion modelmultiple vibrational excitation
spellingShingle Bingrui Liu
Lan Chen
Self-Heating Effect Coupled Compact Model to Predict Hot Carrier Injection Degradation in Nanoscale Bulk FinFETs Under Different Conditions
Applied Sciences
hot carrier injection
bulk FinFET
self-heating effect
self-saturation model
reaction–diffusion model
multiple vibrational excitation
title Self-Heating Effect Coupled Compact Model to Predict Hot Carrier Injection Degradation in Nanoscale Bulk FinFETs Under Different Conditions
title_full Self-Heating Effect Coupled Compact Model to Predict Hot Carrier Injection Degradation in Nanoscale Bulk FinFETs Under Different Conditions
title_fullStr Self-Heating Effect Coupled Compact Model to Predict Hot Carrier Injection Degradation in Nanoscale Bulk FinFETs Under Different Conditions
title_full_unstemmed Self-Heating Effect Coupled Compact Model to Predict Hot Carrier Injection Degradation in Nanoscale Bulk FinFETs Under Different Conditions
title_short Self-Heating Effect Coupled Compact Model to Predict Hot Carrier Injection Degradation in Nanoscale Bulk FinFETs Under Different Conditions
title_sort self heating effect coupled compact model to predict hot carrier injection degradation in nanoscale bulk finfets under different conditions
topic hot carrier injection
bulk FinFET
self-heating effect
self-saturation model
reaction–diffusion model
multiple vibrational excitation
url https://www.mdpi.com/2076-3417/15/5/2351
work_keys_str_mv AT bingruiliu selfheatingeffectcoupledcompactmodeltopredicthotcarrierinjectiondegradationinnanoscalebulkfinfetsunderdifferentconditions
AT lanchen selfheatingeffectcoupledcompactmodeltopredicthotcarrierinjectiondegradationinnanoscalebulkfinfetsunderdifferentconditions