微小型齿轮加工技术
Micro gear is an important part and the processing technology of micro gear is the key in MEMS.The manufacturing technology of micro gear including LIGA and quasi-LIGA,WEDM,micro plastic forming,micro etching method,micro cutting technology etc is presented.The result of micro gear processed by the...
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| Main Authors: | , , , |
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| Format: | Article |
| Language: | zho |
| Published: |
Editorial Office of Journal of Mechanical Transmission
2011-01-01
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| Series: | Jixie chuandong |
| Online Access: | http://www.jxcd.net.cn/thesisDetails#10.16578/j.issn.1004.2539.2011.05.007 |
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