Growth and Characterization of Ga<sub>2</sub>O<sub>3</sub> for Power Nanodevices Using Metal Nanoparticle Catalysts

Growth and Characterization of Ga<sub>2</sub>O<sub>3</sub> for Power Nanodevices Using Metal Nanoparticle Catalysts

A simple and inexpensive thermal oxidation process is used to grow <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> oxide (<i>β</i>-Ga<sub>2</sub>O<sub>3</sub>) thin films/nanorods on a <i>c</i>-plane (0001) sapphire substrate u...

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Bibliographic Details
Main Authors:	Badriyah Alhalaili, Antony Joseph, Latifa Al-Hajji, Naser M. Ali, Sowmya Dean, Ahmad A. Al-Duweesh
Format:	Article
Language:	English
Published:	MDPI AG 2025-07-01
Series:	Nanomaterials
Subjects:	<i>β</i>-Ga<sub>2</sub>O<sub>3</sub> thermal oxidation catalysts silver gold
Online Access:	https://www.mdpi.com/2079-4991/15/15/1169
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Summary:	A simple and inexpensive thermal oxidation process is used to grow <i>β</i>-Ga<sub>2</sub>O<sub>3</sub> oxide (<i>β</i>-Ga<sub>2</sub>O<sub>3</sub>) thin films/nanorods on a <i>c</i>-plane (0001) sapphire substrate using Ag/Au catalysts. The effect of these catalysts on the growth mechanism of Ga<sub>2</sub>O<sub>3</sub> was studied by different characterization techniques, including X-ray diffraction analysis (XRD), Scanning Electron Microscopy (SEM), and Energy Dispersive X-ray analysis (EDX). The XRD results of the grown Ga<sub>2</sub>O<sub>3</sub> on a sapphire substrate show three sharp diffraction peaks located at 19.31°, 38.70° and 59.38° corresponding to the <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mfenced separators="\|"><mrow><mover accent="true"><mrow><mn>2</mn></mrow><mo>¯</mo></mover><mn>01</mn></mrow></mfenced><mo>,</mo><mo> </mo><mfenced separators="\|"><mrow><mover accent="true"><mrow><mn>4</mn></mrow><mo>¯</mo></mover><mn>02</mn></mrow></mfenced></mrow></semantics></math></inline-formula> and <inline-formula><math xmlns="http://www.w3.org/1998/Math/MathML" display="inline"><semantics><mrow><mfenced separators="\|"><mrow><mover accent="true"><mrow><mn>6</mn></mrow><mo>¯</mo></mover><mn>03</mn></mrow></mfenced></mrow></semantics></math></inline-formula> planes of <i>β</i>-Ga<sub>2</sub>O<sub>3</sub>. Field Emission Scanning Electron Microscope (FESEM) analysis showed the formation of longer and denser Ga<sub>2</sub>O<sub>3</sub> nanowires at higher temperatures, especially in the presence of silver nanoparticles as catalysts.
ISSN:	2079-4991