Low voltage operation electrostatic comb drive micro-mirror for laser scanning display
Electrostatic comb drive micro-mirror has limitation of high operation voltage, which has limited its practice use. Recent developments in decreasing operation voltage are promising for mobile micro-mirror. Especially, the operation voltage is decreased substantially by removing the air friction of...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Publishing House for Science and Technology
2012-11-01
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| Series: | Vietnam Journal of Mechanics |
| Subjects: | |
| Online Access: | https://vjs.ac.vn/index.php/vjmech/article/view/2336 |
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