Effects of sputtering process and annealing on the microstructure, crystallization orientation and piezoelectric properties of ZnO films
Ceramic piezoelectric films play a crucial role in sensors, acoustic wave devices, and micro-electromechanical systems (MEMS) due to their superior piezoelectric properties. This study focuses on optimizing ZnO piezoelectric films through radio frequency (RF) magnetron sputtering under a combination...
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| Main Authors: | , , , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2025-01-01
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| Series: | Next Materials |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2949822824003277 |
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