High-sensitivity and low-loss SAW accelerometer base on phononic crystals
The cantilever beam-based surface acoustic wave (SAW) accelerometer has a fast response time and high sensitivity, making it widely used in vibration detection of mechanical structures. In the fabrication and production of the sensor, the sensitivity and loss of the device have always been the key f...
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| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
EDP Sciences
2025-01-01
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| Series: | Acta Acustica |
| Subjects: | |
| Online Access: | https://acta-acustica.edpsciences.org/articles/aacus/full_html/2025/01/aacus250022/aacus250022.html |
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